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CVD Chemical Vapor Deposition
CVD
Parylene Chemical Vapor Deposition

        CVD(Chemical Vapor Deposition),also knows as parylene coating or nano coating.CVD is a technology that is a deposition method used to produce high quality,high-performance,solid materials.The process is often used in the semiconductor industry to produce thin films(0.1-100um).In typical CVD,the part is exposed to one or more volatile precursors,which react and/or decompose on the part surface to produce the desired deposit.Frequently,volatile by-products are also produced,which are removed by gas flow through the reaction chamber.The coating is uniform in thickness, compact without pinhole,transparent without stress and without auxiliary agent, and has excellent electrical insulation and protection. It is the most effective anti-moisture,anti-mildew, anti-corrosion and anti-salt fog coating material.   

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CVD Process

        After the coating, the electronics will have high-dielectric strength and excellent resistance to high and low temperature(-100-200 degree C), anti-corrosion, acid and alkali resistant, lubricating, resistant to dust, moisture and rust. It is a transparent and water proof (IP68), anti-aging, biocompatible material. 

       LPMS designed CVD equipment and used it in the electronics industry. We provide turnkey solution from material,technology and equipment. CVD is wildly used in aviation, PCBA, LED, magnetic material, sensors, silicon rubber, sealing element, medical equipment, precious cultural relics and etc. 


CVD Parylene Coating Features

   

  • Good Biocompatibility. FDA(Class VI)comply and MIL I-46058C comply.


  • Optical transparent, colorless can be used on optical elements and lighting components.


  • The coating is chemically inert and has high chemical resistance and can withstand extremely  temperatures (-60°C to 200°C).


  • It has high dielectric strength and low dielectric constant.


  • Hydrophobic film, low surface energy, good dry film lubrication.

          

  • At room temperature, nano coating layer is formed, and there is no thermal stress.


  • The nano-coating is highly permeable, with no dead angle. The coating is complete and continuous without uniform thickness. 


  • Very low air permeability, no pinhole, excellent waterproof (IP68)


  • Highly conformal. does not form meniscus, nor does it gather or block delicate shapes.


  • Radiation-resistant, for aerospace applications as well as for gamma rays and electron beam sterilization.

Temperature
-60℃ 0℃ 60℃ 120℃ 180℃
-60～200℃
Coating withstand temperatures
Comparison between CVD and Conformal coating

  After CVD coating, the product has high surface chemical purity, uniform coating, no holes, no bubble, no peeling, no thermal stress.

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What Can We Do？

Provide professional and feasible CVD solutions for customer specific projects and Nano-coating processing services.

Provide powder and raw materials for CVD process according to customer's technical requirements and professional technical guidance.

Provide CVD equipment (CVD vacuum coating machine, vacuum degassing furnace and other related equipment). 

Applications OF Parylene Coating

        CVD is wildly used in aviation, PCBA, LED, magnetic material, sensors, silicon rubber, sealing element, medical equipment, precious cultural relics and etc.

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Parylene Coating Machine
We design, manufacture and sell different types and specifications CVD equipment like vacuum vapor deposition coating machinee(Parylene equipment) , vacuum degassing furnace, etc.
Parylene Coating OEM
        LPMS has a standard CVD workshop and more than 10 CVD equipments, we can provide our customers with proofing testing of CVD nano-coating or contract manufacturing services. Also provides services include SMT, DIP, lead-free process, soldering, molding/dispensing, CVD, testing, package and shipping. Also provide new product development service.
Parylene Materials

        CVD uses a long chain protective polymer material called parylene. It can be deposited in vacuum. The good penetrating power of the active molecule can form no pinhole around the bottom of the element and transparent insulating coating of uniform thickness provides high quality protective coating for the component. Resist the damage of acid-base salt spray and various corrosive gas. Because the liquid is not used, there is no aggregation in the coating process, and the bridge forms the meniscus. Macromolecular materials can be classified as N type、C type、 D type、F type and HT type according to their molecular structure. 


Raw material grades

Film forming property

CAT

N type

CAT

C type

CAT

D type

CAT

F(VT4) type

CAT

AF4(HT) type

Density（gm/cc)

1.1

1.3

1.41

1.55

1.5

Dielectric constant（1Mhz)

2.6

2.9

2.8

2.3

2.2

Dielectric strength（V/Mil)

7000

5600

5500

5000

7000

Minimum continuous

working temperature(in the air）

-60°C

-60°C

-60°C

-60°C

-60°C

Maximum continuous 

working temperature(in the air）

60°C

80°C

110°C

200°C

300°C

Friction coefficient-dynamic condition

0.25

0.29

0.38

0.39

0.16

Coefficient of linear expansion

(ppm at 25°C)

69

35

38

45

34

Hydroscopicity（after 24H）

<% 0.1

<% 0.1

<% 0.1

<% 0.1

<% 0.1

WVTR (gm.mm)/m2.day)

0.6

0.08-0.1

0.1

0.25-0.32

0.2

OTR (cc.mm)/(m2.day.atm)

16

3

12.0-13.5

16.8

25.3

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